Inventor
BROWN DANIEL ARTHUR
US11 patents
⚠️ This page may combine multiple inventors who share the name “BROWN DANIEL ARTHUR”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
LAM RES CORP
9 patentsUS10665435B2May 26, 2020
Chamber with vertical support stem for symmetric conductance and RF delivery
LAM RES CORP1 citations72
US10395902B2Aug 27, 2019
Chamber with vertical support stem for symmetric conductance and RF delivery
LAM RES CORP1 citations72
US10049862B2Aug 14, 2018
Chamber with vertical support stem for symmetric conductance and RF delivery
LAM RES CORP4 citations72
US11495486B2Nov 8, 2022
Integrated tool lift
LAM RES CORP2 citations67
US9922804B2Mar 20, 2018
Compression member for use in showerhead electrode assembly
LAM RES CORP1 citations60
US12027411B2Jul 2, 2024
Integrated tool lift
LAM RES CORP0 citations56
US10332729B2Jun 25, 2019
Compression member for use in showerhead electrode assembly
LAM RES CORP0 citations50
US10074521B2Sep 11, 2018
Replaceable upper chamber parts of plasma processing apparatus
LAM RES CORP0 citations49
US11282737B2Mar 22, 2022
Moving substrate transfer chamber
LAM RES CORP0 citations44