Inventor
WU FENG-KUANG
TW17 patents
⚠️ This page may combine multiple inventors who share the name “WU FENG-KUANG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TAIWAN SEMICONDUCTOR MFG CO LTD
14 patentsUS10170287B1Jan 1, 2019
Techniques for detecting micro-arcing occurring inside a semiconductor processing chamber
TAIWAN SEMICONDUCTOR MFG CO LTD15 citations93
US11685055B2Jun 27, 2023
Robot gripper for moving wafer carriers and packing materials and method of operating the same
TAIWAN SEMICONDUCTOR MFG CO LTD6 citations72
US12017342B2Jun 25, 2024
Robot gripper for moving wafer carriers and packing materials and method of operating the same
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations70
US12580390B2Mar 17, 2026
Under-floor charging station
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US12153433B2Nov 26, 2024
Systems and methods for raised floor automated sensor vehicles
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US11437843B2Sep 6, 2022
Under-floor charging station
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US11334080B2May 17, 2022
Systems and methods for raised floor automated sensor vehicles
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US12515349B2Jan 6, 2026
Robot gripper for moving wafer carriers and packing materials and method of operating the same
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations60
US12057301B2Aug 6, 2024
Arcing protection method, processing tool and fabrication system
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations56
US11664206B2May 30, 2023
Arcing protection method and processing tool
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations56
US10734206B2Aug 4, 2020
Techniques for detecting micro-arcing occurring inside a semiconductor processing chamber
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations51
US10559453B2Feb 11, 2020
Techniques for detecting micro-arcing occurring inside a semiconductor processing chamber
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations51
US10971386B1Apr 6, 2021
Device positioning using sensors
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations50
US12165906B2Dec 10, 2024
Apparatus and methods for handling semiconductor part carriers
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations49