Inventor
SREERAM SONTI
US4 patents
Patents
4 patentsUS11168395B2Nov 9, 2021
Temperature-controlled flange and reactor system including same
ASM IP HOLDING BV3 citations71
US10612136B2Apr 7, 2020
Temperature-controlled flange and reactor system including same
ASM IP HOLDING BV3 citations71
US12024775B2Jul 2, 2024
Gas distribution system and reactor system including same
ASM IP HOLDING BV2 citations67
US11718913B2Aug 8, 2023
Gas distribution system and reactor system including same
ASM IP HOLDING BV2 citations67