Inventor
NARKEVICIUTE IEVA
US3 patents
Patents
3 patentsUS11848199B2Dec 19, 2023
Doped or undoped silicon carbide deposition and remote hydrogen plasma exposure for gapfill
LAM RES CORP4 citations72
US12300488B2May 13, 2025
Doped or undoped silicon carbide deposition and remote hydrogen plasma exposure for gapfill
LAM RES CORP0 citations60
US12368075B2Jul 22, 2025
Graphene integration
LAM RES CORP0 citations57