Inventor
SATO HITOMI
JP17 patents
⚠️ This page may combine multiple inventors who share the name “SATO HITOMI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SEMICONDUCTOR ENERGY LAB
7 patentsUS10889888B2Jan 12, 2021
Sputtering target, method for manufacturing sputtering target, and method for forming thin film
SEMICONDUCTOR ENERGY LAB1 citations73
US9666720B2May 30, 2017
Semiconductor device and method of manufacturing the same
SEMICONDUCTOR ENERGY LAB2 citations72
US12252775B2Mar 18, 2025
Sputtering target, method for manufacturing sputtering target, and method for forming thin film
SEMICONDUCTOR ENERGY LAB0 citations62
US11959165B2Apr 16, 2024
Semiconductor device comprising oxide semiconductor film
SEMICONDUCTOR ENERGY LAB0 citations62
US11066739B2Jul 20, 2021
Sputtering target, method for manufacturing sputtering target, and method for forming thin film
SEMICONDUCTOR ENERGY LAB0 citations62
US9812544B2Nov 7, 2017
Semiconductor device and manufacturing method thereof
SEMICONDUCTOR ENERGY LAB0 citations52
US10522689B2Dec 31, 2019
Semiconductor device and method of manufacturing the same
SEMICONDUCTOR ENERGY LAB0 citations51