Inventor
DANNENBERG ARNE
DE14 patents
Patents
14 patentsUS9194388B2Nov 24, 2015
Micro-dosing pump having a rotatable valve disk driven by a magnetized actuator disk
BOSCH GMBH ROBERT15 citations83
US11060937B2Jul 13, 2021
Micromechanical pressure sensor
BOSCH GMBH ROBERT2 citations69
US11326969B2May 10, 2022
Linearized micromechanical sensor
BOSCH GMBH ROBERT2 citations67
US9558880B2Jan 31, 2017
Microtechnical component for a magnetic sensor device or a magnetic actuator and production method for a microtechnical component for a magnetic sensor device or a magnetic actuator
BOSCH GMBH ROBERT2 citations62
US10988377B2Apr 27, 2021
Method for producing a stress-decoupled micromechanical pressure sensor
BOSCH GMBH ROBERT0 citations61
US11519803B2Dec 6, 2022
Method for manufacturing micromechanical diaphragm sensors
BOSCH GMBH ROBERT1 citations55
US11608264B2Mar 21, 2023
Method for manufacturing a substrate having a region mechanically decoupled from a support, method for manufacturing at least one spring, and a substrate
BOSCH GMBH ROBERT0 citations50
US11441964B2Sep 13, 2022
Micromechanical pressure sensor device and corresponding manufacturing method
BOSCH GMBH ROBERT0 citations50
US11208319B2Dec 28, 2021
Method for manufacturing a MEMS unit for a micromechanical pressure sensor
BOSCH GMBH ROBERT0 citations50
US12145840B2Nov 19, 2024
MEMS sensor as well as method for operating a mems sensor
BOSCH GMBH ROBERT0 citations49
US10775253B2Sep 15, 2020
Method for producing a micromechanical component with an exposed pressure sensor device and micromechanical component
BOSCH GMBH ROBERT0 citations48
US11059717B2Jul 13, 2021
Micromechanical pressure sensor and method for producing said micromechanical pressure sensor
BOSCH GMBH ROBERT0 citations44
US9927497B2Mar 27, 2018
Sensor apparatus, production method for a sensor apparatus having at least one magnetic core and method for determining a field strength of a magnetic field in at least one spatial direction
BOSCH GMBH ROBERT0 citations34
US9778323B2Oct 3, 2017
Magnetic sensor device and manufacturing method for a magnetic sensor device
BOSCH GMBH ROBERT0 citations33