Inventor
BRENINGER ANDREW H
US9 patents
⚠️ This page may combine multiple inventors who share the name “BRENINGER ANDREW H”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
LAM RES CORP
8 patentsUS10760158B2Sep 1, 2020
Ex situ coating of chamber components for semiconductor processing
LAM RES CORP14 citations92
US11365479B2Jun 21, 2022
Ex situ coating of chamber components for semiconductor processing
LAM RES CORP8 citations83
US10460977B2Oct 29, 2019
Lift pin holder with spring retention for substrate processing systems
LAM RES CORP10 citations82
US12227837B2Feb 18, 2025
Ex situ coating of chamber components for semiconductor processing
LAM RES CORP2 citations72
US12163219B2Dec 10, 2024
Ex situ coating of chamber components for semiconductor processing
LAM RES CORP0 citations60
US12500114B2Dec 16, 2025
Wafer lift pin mechanism for preventing local backside deposition
LAM RES CORP0 citations57
US12266509B2Apr 1, 2025
Multilayer coatings of component parts for a work piece processing chamber
LAM RES CORP0 citations57
US12272534B2Apr 8, 2025
Plasma viewport
LAM RES CORP0 citations41