Inventor
VENKATASUBRAMANIAN ESWARANAND
US41 patents
Patents
41 patentsUS10745282B2Aug 18, 2020
Diamond-like carbon film
APPLIED MATERIALS INC4 citations84
US11842897B2Dec 12, 2023
High density carbon films for patterning applications
APPLIED MATERIALS INC2 citations73
US11469097B2Oct 11, 2022
Carbon hard masks for patterning applications and methods related thereto
APPLIED MATERIALS INC2 citations73
US11043372B2Jun 22, 2021
High-density low temperature carbon films for hardmask and other patterning applications
APPLIED MATERIALS INC4 citations73
US11028477B2Jun 8, 2021
Bottom-up gap-fill by surface poisoning treatment
APPLIED MATERIALS INC4 citations73
US10954129B2Mar 23, 2021
Diamond-like carbon as mandrel
APPLIED MATERIALS INC3 citations73
US10910381B2Feb 2, 2021
Multicolor approach to DRAM STI active cut patterning
APPLIED MATERIALS INC1 citations73
US10312137B2Jun 4, 2019
Hardmask layer for 3D NAND staircase structure in semiconductor applications
APPLIED MATERIALS INC2 citations73
US11158507B2Oct 26, 2021
In-situ high power implant to relieve stress of a thin film
APPLIED MATERIALS INC2 citations72
US11043375B2Jun 22, 2021
Plasma deposition of carbon hardmask
APPLIED MATERIALS INC4 citations72
US10504727B2Dec 10, 2019
Thick tungsten hardmask films deposition on high compressive/tensile bow wafers
APPLIED MATERIALS INC2 citations72
US11557466B2Jan 17, 2023
Tuneable uniformity control utilizing rotational magnetic housing
APPLIED MATERIALS INC2 citations71
US12486577B2Dec 2, 2025
Pulsed plasma (DC/RF) deposition of high quality C films for patterning
APPLIED MATERIALS INC0 citations62
US12463036B2Nov 4, 2025
High density carbon films for patterning applications
APPLIED MATERIALS INC0 citations62
US12014925B2Jun 18, 2024
Metal-doped carbon hardmasks
APPLIED MATERIALS INC0 citations62
US11784042B2Oct 10, 2023
Carbon hard masks for patterning applications and methods related thereto
APPLIED MATERIALS INC0 citations62
US11676858B2Jun 13, 2023
High bias deposition of high quality gapfill
APPLIED MATERIALS INC1 citations62
US11638374B2Apr 25, 2023
Multicolor approach to DRAM STI active cut patterning
APPLIED MATERIALS INC0 citations62
US11621160B2Apr 4, 2023
Doped and undoped vanadium oxides for low-k spacer applications
APPLIED MATERIALS INC0 citations62
US11603591B2Mar 14, 2023
Pulsed plasma (DC/RF) deposition of high quality C films for patterning
APPLIED MATERIALS INC0 citations62
US11557478B2Jan 17, 2023
In-situ high power implant to relieve stress of a thin film
APPLIED MATERIALS INC0 citations62
US11430655B2Aug 30, 2022
Low temperature high-quality dielectric films
APPLIED MATERIALS INC0 citations62
US11332376B2May 17, 2022
Diamond-like carbon film
APPLIED MATERIALS INC0 citations62
US11335690B2May 17, 2022
Multicolor approach to DRAM STI active cut patterning
APPLIED MATERIALS INC0 citations62
US11094533B2Aug 17, 2021
Doped and undoped vanadium oxides for low-k spacer applications
APPLIED MATERIALS INC0 citations62
US11062939B2Jul 13, 2021
High bias deposition of high quality gapfill
APPLIED MATERIALS INC1 citations62
US10840088B2Nov 17, 2020
Low temperature high-quality dielectric films
APPLIED MATERIALS INC1 citations62
US12555741B2Feb 17, 2026
Magnetic housing systems
APPLIED MATERIALS INC0 citations61
US12362181B2Jul 15, 2025
Methods of forming thermally stable carbon film
APPLIED MATERIALS INC0 citations61
US11587764B2Feb 21, 2023
Magnetic housing systems
APPLIED MATERIALS INC1 citations61
US11270905B2Mar 8, 2022
Modulating film properties by optimizing plasma coupling materials
APPLIED MATERIALS INC0 citations61
US12327733B2Jun 10, 2025
Methods to reduce UNCD film roughness
APPLIED MATERIALS INC0 citations60
US11946134B2Apr 2, 2024
In situ nucleation for nanocrystalline diamond film deposition
APPLIED MATERIALS INC1 citations60
US11560626B2Jan 24, 2023
Substrate processing chamber
APPLIED MATERIALS INC0 citations60
US12534797B2Jan 27, 2026
Vapor-phase precursor seeding for diamond film deposition
APPLIED MATERIALS INC0 citations59
US11894230B2Feb 6, 2024
Tribological properties of diamond films
APPLIED MATERIALS INC0 citations59
US11594416B2Feb 28, 2023
Tribological properties of diamond films
APPLIED MATERIALS INC1 citations59
US12037679B2Jul 16, 2024
Method of forming a diamond film
APPLIED MATERIALS INC0 citations55
US10475642B2Nov 12, 2019
Doped and undoped vanadium oxides for low-k spacer applications
APPLIED MATERIALS INC0 citations52
US10403502B2Sep 3, 2019
Boron doped tungsten carbide for hardmask applications
APPLIED MATERIALS INC0 citations52
US12550651B2Feb 10, 2026
Selective etching of silicon-containing material relative to metal-doped boron films
APPLIED MATERIALS INC0 citations48