Inventor
KNEER BERNHARD
DE12 patents
⚠️ This page may combine multiple inventors who share the name “KNEER BERNHARD”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ZEISS CARL SMT AG
6 patentsUS7372539B2May 13, 2008
Method for distortion correction in a microlithographic projection exposure apparatus
ZEISS CARL SMT AG10 citations83
US7719658B2May 18, 2010
Imaging system for a microlithographical projection light system
ZEISS CARL SMT AG2 citations62
US7605905B2Oct 20, 2009
Method for distortion correction in a microlithographic projection exposure apparatus
ZEISS CARL SMT AG2 citations62
US7522260B1Apr 21, 2009
Method for correcting astigmatism in a microlithography projection exposure apparatus, a projection objective of such a projection exposure apparatus, and a fabrication method for micropatterned components
ZEISS CARL SMT AG5 citations62
US7457043B2Nov 25, 2008
Projection exposure system
ZEISS CARL SMT AG1 citations51
US7408621B2Aug 5, 2008
Projection exposure system
ZEISS CARL SMT AG1 citations51
ZEISS CARL SMT GMBH
3 patentsUS9436095B2Sep 6, 2016
Exposure apparatus and measuring device for a projection lens
ZEISS CARL SMT GMBH1 citations62
US10345710B2Jul 9, 2019
Microlithographic projection exposure apparatus and measuring device for a projection lens
ZEISS CARL SMT GMBH0 citations51
US9696631B2Jul 4, 2017
Method for stress-adjusted operation of a projection exposure system and corresponding projection exposure system
ZEISS CARL SMT GMBH0 citations51