Inventor
GROBMAN WARREN D
US11 patents
⚠️ This page may combine multiple inventors who share the name “GROBMAN WARREN D”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
MOTOROLA INC
5 patentsUS5900340AMay 4, 1999
One dimensional lithographic proximity correction using DRC shape functions
MOTOROLA INC269 citations98
US5920487AJul 6, 1999
Two dimensional lithographic proximity correction using DRC shape functions
MOTOROLA INC70 citations94
US6106567AAug 22, 2000
Circuit design verification tool and method therefor using maxwell's equations
MOTOROLA INC23 citations91
US6605395B2Aug 12, 2003
Method and apparatus for forming a pattern on an integrated circuit using differing exposure characteristics
MOTOROLA INC11 citations71
US6645678B2Nov 11, 2003
Method and apparatus for making an integrated circuit using polarization properties of light
MOTOROLA INC9 citations66
IBM
5 patentsUS4408338AOct 4, 1983
Pulsed electromagnetic radiation source having a barrier for discharged debris
IBM82 citations95
US4622095ANov 11, 1986
Laser stimulated halogen gas etching of metal substrates
IBM57 citations93
US4453086AJun 5, 1984
Electron beam system with reduced charge buildup
IBM35 citations92
US4880684ANov 14, 1989
Sealing and stress relief layers and use thereof
IBM83 citations91
US4405238ASep 20, 1983
Alignment method and apparatus for x-ray or optical lithography
IBM36 citations89