Inventor
TERADA KAZUO
JP18 patents
⚠️ This page may combine multiple inventors who share the name “TERADA KAZUO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
5 patentsUS5616264AApr 1, 1997
Method and apparatus for controlling temperature in rapid heat treatment system
TOKYO ELECTRON LTD565 citations98
US5334257AAug 2, 1994
Treatment object supporting device
TOKYO ELECTRON LTD46 citations92
US5324540AJun 28, 1994
System and method for supporting and rotating substrates in a process chamber
TOKYO ELECTRON LTD52 citations92
US7871265B2Jan 18, 2011
Heat treatment device
TOKYO ELECTRON LTD5 citations62
US8006636B2Aug 30, 2011
Substrate treatment apparatus
TOKYO ELECTRON LTD0 citations41
IBM
3 patentsUS6468599B1Oct 22, 2002
Method for removing organic compound by ultraviolet radiation
IBM18 citations92
US6329663B1Dec 11, 2001
Method and apparatus for cleaning a glass substrate for a color filter
IBM10 citations73
US6756087B2Jun 29, 2004
Method for removing organic compound by ultraviolet radiation and apparatus therefor
IBM4 citations62
TOSHIMA TAKAYUKI
3 patentsUS8434423B2May 7, 2013
Substrate carrying apparatus having circumferential sidewall and substrate processing system
TOSHIMA TAKAYUKI6 citations72
US9076643B2Jul 7, 2015
Supercritical processing apparatus, substrate processing system and supercritical processing method
TOSHIMA TAKAYUKI2 citations62
US8235061B2Aug 7, 2012
Substrate processing apparatus and substrate processing method
TOSHIMA TAKAYUKI3 citations61