Inventor
MATTHEWS ROBERT T
US25 patents
Patents
25 patentsUS5580385ADec 3, 1996
Structure and method for incorporating an inductively coupled plasma source in a plasma processing chamber
TEXAS INSTRUMENTS INC149 citations99
US5464499ANov 7, 1995
Multi-electrode plasma processing apparatus
TEXAS INSTRUMENTS INC297 citations99
US5453124ASep 26, 1995
Programmable multizone gas injector for single-wafer semiconductor processing equipment
TEXAS INSTRUMENTS INC908 citations99
US5446825AAug 29, 1995
High performance multi-zone illuminator module for semiconductor wafer processing
TEXAS INSTRUMENTS INC158 citations99
US4886570ADec 12, 1989
Processing apparatus and method
TEXAS INSTRUMENTS INC160 citations99
US4820377AApr 11, 1989
Method for cleanup processing chamber and vacuum process module
TEXAS INSTRUMENTS INC334 citations99
US4816098AMar 28, 1989
Apparatus for transferring workpieces
TEXAS INSTRUMENTS INC185 citations99
US4949671AAug 21, 1990
Processing apparatus and method
TEXAS INSTRUMENTS INC372 citations98
US4911103AMar 27, 1990
Processing apparatus and method
TEXAS INSTRUMENTS INC167 citations98
US5591493AJan 7, 1997
Structure and method for incorporating an inductively coupled plasma source in a plasma processing chamber
TEXAS INSTRUMENTS INC49 citations96
US5286297AFeb 15, 1994
Multi-electrode plasma processing apparatus
TEXAS INSTRUMENTS INC96 citations96
US5248636ASep 28, 1993
Processing method using both a remotely generated plasma and an in-situ plasma with UV irradiation
TEXAS INSTRUMENTS INC86 citations96
US5138973AAug 18, 1992
Wafer processing apparatus having independently controllable energy sources
TEXAS INSTRUMENTS INC108 citations96
US4842686AJun 27, 1989
Wafer processing apparatus and method
TEXAS INSTRUMENTS INC54 citations96
US4832777AMay 23, 1989
Processing apparatus and method
TEXAS INSTRUMENTS INC53 citations96
US4822450AApr 18, 1989
Processing apparatus and method
TEXAS INSTRUMENTS INC56 citations96
US4818327AApr 4, 1989
Wafer processing apparatus
TEXAS INSTRUMENTS INC77 citations96
US5345534ASep 6, 1994
Semiconductor wafer heater with infrared lamp module with light blocking means
TEXAS INSTRUMENTS INC80 citations95
US4836905AJun 6, 1989
Processing apparatus
TEXAS INSTRUMENTS INC117 citations94
US4875989AOct 24, 1989
Wafer processing apparatus
TEXAS INSTRUMENTS INC57 citations93
US5653838AAug 5, 1997
Glass heating and sealing system
TEXAS INSTRUMENTS INC25 citations92
US4832778AMay 23, 1989
Processing apparatus for wafers
TEXAS INSTRUMENTS INC39 citations92
US4830700AMay 16, 1989
Processing apparatus and method
TEXAS INSTRUMENTS INC37 citations92
US4872938AOct 10, 1989
Processing apparatus
TEXAS INSTRUMENTS INC51 citations91
US4832779AMay 23, 1989
Processing apparatus
TEXAS INSTRUMENTS INC31 citations91