Inventor
ATWELL DAVID R
US13 patents
⚠️ This page may combine multiple inventors who share the name “ATWELL DAVID R”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
MICRON TECHNOLOGY INC
10 patentsUS5674574AOct 7, 1997
Vapor delivery system for solid precursors and method regarding same
MICRON TECHNOLOGY INC114 citations97
US5764849AJun 9, 1998
Solid precursor injector apparatus and method
MICRON TECHNOLOGY INC44 citations95
US5693377ADec 2, 1997
Method of reducing carbon incorporation into films produced by chemical vapor deposition involving titanium organometallic and metal-organic precursor compounds
MICRON TECHNOLOGY INC49 citations95
US6280793B1Aug 28, 2001
Electrostatic method and apparatus for vaporizing precursors and system for using same
MICRON TECHNOLOGY INC43 citations92
US6206970B1Mar 27, 2001
Semiconductor wafer processor, semiconductor processor gas filtering system and semiconductor processing methods
MICRON TECHNOLOGY INC49 citations92
US5943471AAug 24, 1999
Solid precursor injector apparatus and method
MICRON TECHNOLOGY INC19 citations92
US5902651AMay 11, 1999
Method of reducing carbon incorporation into films produced by chemical vapor deposition involving titanium organometallic and metal-organic precursor compounds
MICRON TECHNOLOGY INC31 citations92
US7883745B2Feb 8, 2011
Chemical vaporizer for material deposition systems and associated methods
MICRON TECHNOLOGY INC8 citations84
US6072939AJun 6, 2000
Solid precursor injector apparatus
MICRON TECHNOLOGY INC14 citations81
US7789319B2Sep 7, 2010
System and method for recirculating fluid supply for an injector for a semiconductor fabrication chamber
MICRON TECHNOLOGY INC1 citations52