Inventor · disambiguated record
Joseph P. Kirk
Also filed as: KIRK JOSEPH · KIRK JOSEPH P · KIRK JOSEPH PENNELL
9 granted patents·231 citations·filing 1978–2001
90Inventor score
Top patents by PatentIndex Score
9 records- 0189US6842237B2Phase shifted test pattern for monitoring focus and aberrations in optical projection systemsIBM·Filed 2001·Granted Jan 11, 2005·36 cites·17 claims
- 0288US4293224AOptical system and technique for unambiguous film thickness monitoringIBM·Filed 1978·Granted Oct 6, 1981·43 cites·10 claims
- 0383US6091486ABlazed grating measurements of lithographic lens aberrationsIBM·Filed 1999·Granted Jul 18, 2000·45 cites·11 claims
- 0478US5663785ADiffraction pupil filler modified illuminator for annular pupil fillsIBM·Filed 1995·Granted Sep 2, 1997·45 cites·5 claims
- 0569US6048651AFresnel zone mask for pupilgramIBM·Filed 1998·Granted Apr 11, 2000·27 cites·25 claims
- 0659US6606151B2Grating patterns and method for determination of azimuthal and radial aberrationINFINEON TECHNOLOGIES AG·Filed 2001·Granted Aug 12, 2003·8 cites·35 claims
- 0759US5808731ASystem and method for visually determining the performance of a photolithography systemIBM·Filed 1997·Granted Sep 15, 1998·19 cites·23 claims
- 0837US4260259AMetal etch rate analyzerIBM·Filed 1978·Granted Apr 7, 1981·5 cites·5 claims
- 0930US5898498APoint interferometer to measure phase shift in reticlesIBM·Filed 1998·Granted Apr 27, 1999·3 cites·17 claims
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