Inventor
CHERN CHYI
US7 patents
⚠️ This page may combine multiple inventors who share the name “CHERN CHYI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
5 patentsUS6500742B1Dec 31, 2002
Construction of a film on a semiconductor wafer
APPLIED MATERIALS INC36 citations96
US5834068ANov 10, 1998
Wafer surface temperature control for deposition of thin films
APPLIED MATERIALS INC73 citations94
US6291343B1Sep 18, 2001
Plasma annealing of substrates to improve adhesion
APPLIED MATERIALS INC45 citations92
US6444036B2Sep 3, 2002
Construction of a film on a semiconductor wafer
APPLIED MATERIALS INC13 citations73
US6251758B1Jun 26, 2001
Construction of a film on a semiconductor wafer
APPLIED MATERIALS INC11 citations73