Inventor
HAN NIANCI
US16 patents
⚠️ This page may combine multiple inventors who share the name “HAN NIANCI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
11 patentsUS6120640ASep 19, 2000
Boron carbide parts and coatings in a plasma reactor
APPLIED MATERIALS INC348 citations99
US6508911B1Jan 21, 2003
Diamond coated parts in a plasma reactor
APPLIED MATERIALS INC80 citations98
US6352611B1Mar 5, 2002
Ceramic composition for an apparatus and method for processing a substrate
APPLIED MATERIALS INC97 citations98
US6123791ASep 26, 2000
Ceramic composition for an apparatus and method for processing a substrate
APPLIED MATERIALS INC118 citations98
US5904778AMay 18, 1999
Silicon carbide composite article particularly useful for plasma reactors
APPLIED MATERIALS INC146 citations97
US7371467B2May 13, 2008
Process chamber component having electroplated yttrium containing coating
APPLIED MATERIALS INC37 citations96
US6641697B2Nov 4, 2003
Substrate processing using a member comprising an oxide of a group IIIB metal
APPLIED MATERIALS INC53 citations96
US6592707B2Jul 15, 2003
Corrosion-resistant protective coating for an apparatus and method for processing a substrate
APPLIED MATERIALS INC63 citations93
US6623595B1Sep 23, 2003
Wavy and roughened dome in plasma processing reactor
APPLIED MATERIALS INC47 citations92
US7833401B2Nov 16, 2010
Electroplating an yttrium-containing coating on a chamber component
APPLIED MATERIALS INC7 citations74
US6413389B1Jul 2, 2002
Method for recovering metal from etch by-products
APPLIED MATERIALS INC9 citations73
HAN NIANCI
3 patentsUS9012030B2Apr 21, 2015
Process chamber component having yttrium—aluminum coating
HAN NIANCI30 citations96
US8114525B2Feb 14, 2012
Process chamber component having electroplated yttrium containing coating
HAN NIANCI1 citations61
US8110086B2Feb 7, 2012
Method of manufacturing a process chamber component having yttrium-aluminum coating
HAN NIANCI2 citations61