Inventor
TSENG LING-HSIN
TW5 patents
Patents
5 patentsUS5759498AJun 2, 1998
Gas exhaust apparatus
UNITED MICROELECTRONICS CORP47 citations84
US6334404B1Jan 1, 2002
Method and apparatus for reducing particle contamination on wafers
UNITED MICROELECTRONICS CORP5 citations59
US6427470B1Aug 6, 2002
Cooling system for reducing particles pollution
UNITED MICROELECTRONICS CORP5 citations58
US6746238B2Jun 8, 2004
Cooling system for reducing particles pollution
UNITED MICROELECTRONICS CORP0 citations48
US6119717ASep 19, 2000
Fluid flow control apparatus
UNITED MICROELECTRONICS CORP1 citations42