Inventor
YASUI KENICHI
JP23 patents
⚠️ This page may combine multiple inventors who share the name “YASUI KENICHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
NUFLARE TECHNOLOGY INC
22 patentsUS9558315B2Jan 31, 2017
Method of generating write data, multi charged particle beam writing apparatus, and pattern inspection apparatus
NUFLARE TECHNOLOGY INC8 citations83
US10199199B2Feb 5, 2019
Drawing data creation method and charged particle beam drawing apparatus
NUFLARE TECHNOLOGY INC2 citations73
US11327408B2May 10, 2022
Writing data generating method and multi charged particle beam writing apparatus
NUFLARE TECHNOLOGY INC2 citations72
US11199781B2Dec 14, 2021
Writing data generating method, multi charged particle beam writing apparatus, pattern inspecting apparatus, and computer-readable recording medium
NUFLARE TECHNOLOGY INC2 citations72
US10685435B2Jun 16, 2020
Drawing data generating method
NUFLARE TECHNOLOGY INC2 citations72
US9779913B2Oct 3, 2017
Charged particle beam drawing apparatus and drawing data generation method
NUFLARE TECHNOLOGY INC2 citations71
US11789372B2Oct 17, 2023
Writing data generating method and multi charged particle beam writing apparatus
NUFLARE TECHNOLOGY INC0 citations62
US11774860B2Oct 3, 2023
Writing data generating method, multi charged particle beam writing apparatus, pattern inspecting apparatus, and computer-readable recording medium
NUFLARE TECHNOLOGY INC0 citations62
US11749499B2Sep 5, 2023
Data generation method and charged particle beam irradiation device
NUFLARE TECHNOLOGY INC1 citations61
US10971331B2Apr 6, 2021
Writing data generation method, computer-readable recording medium on which program is recorded, and multi-charged particle beam writing apparatus
NUFLARE TECHNOLOGY INC1 citations54
US12488959B2Dec 2, 2025
Coverage calculating method, charged particle beam writing method, coverage calculating device, charged particle beam writing apparatus, and computer-readable storage medium
NUFLARE TECHNOLOGY INC0 citations51
US11942305B2Mar 26, 2024
Data generation method, charged particle beam irradiation device, and computer-readable recording medium
NUFLARE TECHNOLOGY INC0 citations51
US11456153B2Sep 27, 2022
Charged particle beam writing method and charged particle beam writing apparatus
NUFLARE TECHNOLOGY INC0 citations51
US11443918B2Sep 13, 2022
Charged particle beam writing method and charged particle beam writing apparatus
NUFLARE TECHNOLOGY INC0 citations51
US9846760B2Dec 19, 2017
Writing data verification method and multi-charged particle beam writing apparatus
NUFLARE TECHNOLOGY INC0 citations51
US9659745B2May 23, 2017
Charged particle beam drawing apparatus, information processing apparatus and pattern inspection apparatus
NUFLARE TECHNOLOGY INC0 citations51
US10503860B2Dec 10, 2019
Method of creating writing data
NUFLARE TECHNOLOGY INC0 citations41
US10445450B2Oct 15, 2019
Generating method of drawing data and charged particle beam drawing method
NUFLARE TECHNOLOGY INC0 citations41
US10096452B2Oct 9, 2018
Data processing method, charged particle beam writing method, and charged particle beam writing apparatus
NUFLARE TECHNOLOGY INC0 citations41
US9984853B2May 29, 2018
Method for generating writing data
NUFLARE TECHNOLOGY INC0 citations41
US10714312B2Jul 14, 2020
Data processing method, charged particle beam writing apparatus, and charged particle beam writing system
NUFLARE TECHNOLOGY INC0 citations40
US9715994B2Jul 25, 2017
Charged particle beam drawing apparatus, format check apparatus and format check method
NUFLARE TECHNOLOGY INC0 citations40