Inventor
FENG JOE
US12 patents
⚠️ This page may combine multiple inventors who share the name “FENG JOE”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
9 patentsUS6562544B1May 13, 2003
Method and apparatus for improving accuracy in photolithographic processing of substrates
APPLIED MATERIALS INC53 citations96
US5968324AOct 19, 1999
Method and apparatus for depositing antireflective coating
APPLIED MATERIALS INC85 citations96
US6635583B2Oct 21, 2003
Silicon carbide deposition for use as a low-dielectric constant anti-reflective coating
APPLIED MATERIALS INC72 citations95
US6083852AJul 4, 2000
Method for applying films using reduced deposition rates
APPLIED MATERIALS INC69 citations95
US6656840B2Dec 2, 2003
Method for forming silicon containing layers on a substrate
APPLIED MATERIALS INC54 citations93
US7070657B1Jul 4, 2006
Method and apparatus for depositing antireflective coating
APPLIED MATERIALS INC24 citations92
US6324439B1Nov 27, 2001
Method and apparatus for applying films using reduced deposition rates
APPLIED MATERIALS INC37 citations91
US6951826B2Oct 4, 2005
Silicon carbide deposition for use as a low dielectric constant anti-reflective coating
APPLIED MATERIALS INC14 citations83
US6797646B2Sep 28, 2004
Method of nitrogen doping of fluorinated silicate glass (FSG) while removing the photoresist layer
APPLIED MATERIALS INC5 citations61