Inventor
NGAI CHRIS
US4 patents
Patents
4 patentsUS6635583B2Oct 21, 2003
Silicon carbide deposition for use as a low-dielectric constant anti-reflective coating
APPLIED MATERIALS INC72 citations95
US6365518B1Apr 2, 2002
Method of processing a substrate in a processing chamber
APPLIED MATERIALS INC95 citations95
US6451686B1Sep 17, 2002
Control of semiconductor device isolation properties through incorporation of fluorine in peteos films
APPLIED MATERIALS INC25 citations90
US6951826B2Oct 4, 2005
Silicon carbide deposition for use as a low dielectric constant anti-reflective coating
APPLIED MATERIALS INC14 citations83