Inventor
HUANG JUDY
US17 patents
⚠️ This page may combine multiple inventors who share the name “HUANG JUDY”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
11 patentsUS6821571B2Nov 23, 2004
Plasma treatment to enhance adhesion and to minimize oxidation of carbon-containing layers
APPLIED MATERIALS INC262 citations98
US6358573B1Mar 19, 2002
Mixed frequency CVD process
APPLIED MATERIALS INC130 citations98
US6077764AJun 20, 2000
Process for depositing high deposition rate halogen-doped silicon oxide layer
APPLIED MATERIALS INC91 citations98
US6098568AAug 8, 2000
Mixed frequency CVD apparatus
APPLIED MATERIALS INC106 citations97
US6635583B2Oct 21, 2003
Silicon carbide deposition for use as a low-dielectric constant anti-reflective coating
APPLIED MATERIALS INC72 citations95
US7144606B2Dec 5, 2006
Plasma treatment to enhance adhesion and to minimize oxidation of carbon-containing layers
APPLIED MATERIALS INC23 citations92
US6734102B2May 11, 2004
Plasma treatment for copper oxide reduction
APPLIED MATERIALS INC39 citations92
US6395092B1May 28, 2002
Apparatus for depositing high deposition rate halogen-doped silicon oxide layer
APPLIED MATERIALS INC30 citations92
US6451686B1Sep 17, 2002
Control of semiconductor device isolation properties through incorporation of fluorine in peteos films
APPLIED MATERIALS INC25 citations90
US6541369B2Apr 1, 2003
Method and apparatus for reducing fixed charges in a semiconductor device
APPLIED MATERIALS INC24 citations88
US6951826B2Oct 4, 2005
Silicon carbide deposition for use as a low dielectric constant anti-reflective coating
APPLIED MATERIALS INC14 citations83
NOVELLUS SYSTEMS INC
3 patentsUS6533855B1Mar 18, 2003
Dispersions of silicalite and zeolite nanoparticles in nonpolar solvents
NOVELLUS SYSTEMS INC103 citations97
US6436843B1Aug 20, 2002
System and method for coating substrates using ink jet technology
NOVELLUS SYSTEMS INC19 citations90
US6827982B1Dec 7, 2004
Binder-enriched silicalite adhesion layer and apparatus for fabricating the same
NOVELLUS SYSTEMS INC4 citations60