Inventor

CHUANG YUNG-HO

US84 patents

⚠️ This page may combine multiple inventors who share the name “CHUANG YUNG-HO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

CHUANG YUNG-HO

KLA TENCOR CORP

System and method for analyzing topological features on a surface

High NA system for multiple mode imaging

193NM laser and inspection system

Split field inspection system using small catadioptric objectives

Ultra-broadband UV microscope imaging system with wide range zoom capability

High NA imaging system

193 nm laser and an inspection system using a 193 nm laser

193nm laser and inspection system

Photomultiplier tube, image sensor, and an inspection system using a PMT or image sensor

Method and apparatus for high speed acquisition of moving images using pulsed illumination

Broad band deep ultraviolet/vacuum ultraviolet catadioptric imaging system

Broad-band deep ultraviolet/vacuum ultraviolet catadioptric imaging system

Passivation of nonlinear optical crystals

Ultra-broadband UV microscope imaging system with wide range zoom capability

Passivation of nonlinear optical crystals

System and method for reducing the bandwidth of a laser and an inspection system and method using a laser

Low noise, high stability, deep ultra-violet, continuous wave laser

193nm laser and inspection system

Low noise, high stability, deep ultra-violet, continuous wave laser

TDI sensor modules with localized driving and signal processing circuitry for high speed inspection

Alleviation of laser-induced damage in optical materials by suppression of transient color centers formation and control of phonon population

CW DUV laser with improved stability

CW DUV laser with improved stability

Interposer based imaging sensor for high-speed image acquisition and inspection systems

KLA TENCOR TECH CORP

Method and apparatus for simultaneous high-speed acquisition of multiple images

Beam delivery system for laser dark-field illumination in a catadioptric optical system

Excimer laser inspection system

Broad band DUV, VUV long-working distance catadioptric imaging system

Apparatus for continuous clocking of TDI sensors

Continuous clocking of TDI sensors

Peak power and speckle contrast reduction for a single laser pulse

Beam delivery system for laser dark-field illumination in a catadioptric optical system

Non-critical phase matching in CLBO to generate sub-213nm wavelengths

Peak power and speckle contrast reduction for a single layer pulse

Broad band DUV, VUV long-working distance catadioptric imaging system

Broad spectrum ultraviolet inspection systems employing catadioptric imaging

Fiber amplifier based light source for semiconductor inspection

Excimer laser inspection system

Broad band objective having improved lateral color performance

Peak power and speckle contrast reduction for a single layer pulse

KLA INSTR CORP

Broad spectrum ultraviolet catadioptric imaging system

Broad spectrum ultraviolet inspection methods employing catadioptric imaging

CHUANG YUNG-HO

Passivation of nonlinear optical crystals

Semiconductor inspection and metrology system using laser pulse multiplier

(unassigned)

Ultra-broadband UV microscope imaging system with wide range zoom capability

BROWN DAVID L

TDI sensor modules with localized driving and signal processing circuitry for high speed inspection

KLA TENCOR INC

Broad spectrum ultraviolet inspection methods employing catadioptric imaging

UNIV ROCHESTER

System for generating pluralities of optical pulses with predetermined frequencies in a temporally and spatially overlapped relationship

KLA TENCOR TECHNOLOGIES INC

Inspection system using small catadioptric objective

DZIURA THADDEUS G

Method of optimizing an optical parametric model for structural analysis using optical critical dimension (OCD) metrology