Inventor
ARMSTRONG J JOSEPH
US68 patents
⚠️ This page may combine multiple inventors who share the name “ARMSTRONG J JOSEPH”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
KLA TENCOR CORP
29 patentsUS6137570AOct 24, 2000
System and method for analyzing topological features on a surface
KLA TENCOR CORP161 citations99
US6064517AMay 16, 2000
High NA system for multiple mode imaging
KLA TENCOR CORP135 citations99
US8929406B2Jan 6, 2015
193NM laser and inspection system
KLA TENCOR CORP63 citations98
US7957066B2Jun 7, 2011
Split field inspection system using small catadioptric objectives
KLA TENCOR CORP55 citations98
US6392793B1May 21, 2002
High NA imaging system
KLA TENCOR CORP39 citations96
US9608399B2Mar 28, 2017
193 nm laser and an inspection system using a 193 nm laser
KLA TENCOR CORP21 citations94
US9529182B2Dec 27, 2016
193nm laser and inspection system
KLA TENCOR CORP33 citations94
US9151940B2Oct 6, 2015
Semiconductor inspection and metrology system using laser pulse multiplier
KLA TENCOR CORP32 citations93
US7884998B2Feb 8, 2011
Catadioptric microscope objective employing immersion liquid for use in broad band microscopy
KLA TENCOR CORP20 citations93
US6801358B2Oct 5, 2004
Broad band deep ultraviolet/vacuum ultraviolet catadioptric imaging system
KLA TENCOR CORP24 citations93
US6512631B2Jan 28, 2003
Broad-band deep ultraviolet/vacuum ultraviolet catadioptric imaging system
KLA TENCOR CORP30 citations93
US9748729B2Aug 29, 2017
183NM laser and inspection system
KLA TENCOR CORP14 citations84
US9318869B2Apr 19, 2016
193nm laser and inspection system
KLA TENCOR CORP11 citations84
US9525265B2Dec 20, 2016
Laser repetition rate multiplier and flat-top beam profile generators using mirrors and/or prisms
KLA TENCOR CORP6 citations83
US6560011B2May 6, 2003
High NA system for multiple mode imaging
KLA TENCOR CORP12 citations82
US7518789B2Apr 14, 2009
Broad band deep ultraviolet/vacuum ultraviolet catadioptric imaging system
KLA TENCOR CORP5 citations74
US7035001B2Apr 25, 2006
High NA system for multiple mode imaging
KLA TENCOR CORP10 citations74
US10199149B2Feb 5, 2019
183NM laser and inspection system
KLA TENCOR CORP2 citations73
US9972959B2May 15, 2018
Semiconductor inspection and metrology system using laser pulse multiplier
KLA TENCOR CORP2 citations73
US9753352B1Sep 5, 2017
High damage threshold frequency conversion system
KLA TENCOR CORP2 citations73
US9419407B2Aug 16, 2016
Laser assembly and inspection system using monolithic bandwidth narrowing apparatus
KLA TENCOR CORP5 citations73
US9413134B2Aug 9, 2016
Multi-stage ramp-up annealing for frequency-conversion crystals
KLA TENCOR CORP3 citations73
US9209589B2Dec 8, 2015
Reducing the spectral bandwidth of lasers
KLA TENCOR CORP4 citations73
US9042006B2May 26, 2015
Solid state illumination source and inspection system
KLA TENCOR CORP4 citations73
US7465913B2Dec 16, 2008
System and method for sensing using adjustable modulation transfer function (MTF) with voltage variations relative to depletion depth at a pixel
KLA TENCOR CORP6 citations73
US9768577B2Sep 19, 2017
Semiconductor inspection and metrology system using laser pulse multiplier
KLA TENCOR CORP5 citations72
US9152008B1Oct 6, 2015
High damage threshold frequency conversion system
KLA TENCOR CORP3 citations63
US9097683B2Aug 4, 2015
Laser with high quality, stable output beam, and long life high conversion efficiency non-linear crystal
KLA TENCOR CORP3 citations63
US8964798B2Feb 24, 2015
Reducing the spectral bandwidth of lasers
KLA TENCOR CORP3 citations63
KLA TENCOR TECH CORP
12 patentsUS7345825B2Mar 18, 2008
Beam delivery system for laser dark-field illumination in a catadioptric optical system
KLA TENCOR TECH CORP60 citations98
US7136159B2Nov 14, 2006
Excimer laser inspection system
KLA TENCOR TECH CORP69 citations98
US6693930B1Feb 17, 2004
Peak power and speckle contrast reduction for a single laser pulse
KLA TENCOR TECH CORP66 citations96
US7817260B2Oct 19, 2010
Beam delivery system for laser dark-field illumination in a catadioptric optical system
KLA TENCOR TECH CORP28 citations93
US7627007B1Dec 1, 2009
Non-critical phase matching in CLBO to generate sub-213nm wavelengths
KLA TENCOR TECH CORP42 citations93
US7187500B2Mar 6, 2007
Peak power and speckle contrast reduction for a single layer pulse
KLA TENCOR TECH CORP22 citations93
US7924892B2Apr 12, 2011
Fiber amplifier based light source for semiconductor inspection
KLA TENCOR TECH CORP15 citations84
US7728968B2Jun 1, 2010
Excimer laser inspection system
KLA TENCOR TECH CORP14 citations84
US7474461B2Jan 6, 2009
Broad band objective having improved lateral color performance
KLA TENCOR TECH CORP14 citations84
US7449673B2Nov 11, 2008
Peak power and speckle contrast reduction for a single layer pulse
KLA TENCOR TECH CORP10 citations84
US7180658B2Feb 20, 2007
High performance catadioptric imaging system
KLA TENCOR TECH CORP8 citations74
US7126100B1Oct 24, 2006
System and method for sensing using adjustable modulation transfer function (MTF)
KLA TENCOR TECH CORP10 citations74
ARMSTRONG J JOSEPH
6 patentsUS8686331B2Apr 1, 2014
Dynamic wavefront control of a frequency converted laser system
ARMSTRONG J JOSEPH42 citations94
US8298335B2Oct 30, 2012
Enclosure for controlling the environment of optical crystals
ARMSTRONG J JOSEPH36 citations92
US8896917B2Nov 25, 2014
External beam delivery system using catadioptric objective with aspheric surfaces
ARMSTRONG J JOSEPH11 citations84
US8824514B2Sep 2, 2014
Measuring crystal site lifetime in a non-linear optical crystal
ARMSTRONG J JOSEPH12 citations84
US8711470B2Apr 29, 2014
High damage threshold frequency conversion system
ARMSTRONG J JOSEPH5 citations84
US8665536B2Mar 4, 2014
External beam delivery system for laser dark-field illumination in a catadioptric optical system
ARMSTRONG J JOSEPH13 citations84
DRIBINSKI VLADIMIR
1 patentKLA TENCOR TECHNOLOGIES INC
1 patentCHUANG YUNG-HO
1 patentShowing the top 50 of 68 patents by PatentIndex Score.