P

Inventor

YOKOYAMA NATSUKI

JP61 patents
⚠️ This page may combine multiple inventors who share the name “YOKOYAMA NATSUKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

HITACHI LTD

23 patents
US6099598AAug 8, 2000

Fabrication system and fabrication method

HITACHI LTD99 citations99
US5820679AOct 13, 1998

Fabrication system and method having inter-apparatus transporter

HITACHI LTD144 citations99
US4897709AJan 30, 1990

Titanium nitride film in contact hole with large aspect ratio

HITACHI LTD151 citations99
US7402449B2Jul 22, 2008

Integrated micro electro-mechanical system and manufacturing method thereof

HITACHI LTD130 citations98
US5981399ANov 9, 1999

Method and apparatus for fabricating semiconductor devices

HITACHI LTD114 citations97
US5858863AJan 12, 1999

Fabrication system and method having inter-apparatus transporter

HITACHI LTD63 citations96
US5562800AOct 8, 1996

Wafer transport method

HITACHI LTD69 citations96
US5270259ADec 14, 1993

Method for fabricating an insulating film from a silicone resin using O.sub.

HITACHI LTD69 citations96
US5177589AJan 5, 1993

Refractory metal thin film having a particular step coverage factor and ratio of surface roughness

HITACHI LTD54 citations96
US7045843B2May 16, 2006

Semiconductor device using MEMS switch

HITACHI LTD50 citations93
US7325457B2Feb 5, 2008

Sensor and sensor module

HITACHI LTD21 citations92
US6461957B1Oct 8, 2002

Method of manufacturing semiconductor device

HITACHI LTD38 citations92
US6103566AAug 15, 2000

Method for manufacturing semiconductor integrated circuit device having a titanium electrode

HITACHI LTD22 citations92
US5601686AFeb 11, 1997

Wafer transport method

HITACHI LTD26 citations92
US5270232ADec 14, 1993

Process for fabricating field effect transistor

HITACHI LTD27 citations92
US5175017ADec 29, 1992

Method of forming metal or metal silicide film

HITACHI LTD43 citations92
US4792842ADec 20, 1988

Semiconductor device with wiring layer using bias sputtering

HITACHI LTD44 citations92
US7451656B2Nov 18, 2008

Semiconductor device embedded with pressure sensor and manufacturing method thereof

HITACHI LTD13 citations84
US7270012B2Sep 18, 2007

Semiconductor device embedded with pressure sensor and manufacturing method thereof

HITACHI LTD13 citations84
US6204184B1Mar 20, 2001

Method of manufacturing semiconductor devices

HITACHI LTD12 citations74
US8890278B2Nov 18, 2014

Semiconductor device

HITACHI LTD4 citations73
US7906796B2Mar 15, 2011

Bipolar device and fabrication method thereof

HITACHI LTD4 citations63
US7405588B2Jul 29, 2008

Device and data processing method employing the device

HITACHI LTD2 citations63

RENESAS TECH CORP

13 patents

SHIMIZU HARUKA

4 patents

HITACHI POWER SEMICONDUCTOR DEVICE LTD

2 patents

HITACHI ULSI SYS CO LTD

2 patents

ARAI KOICHI

1 patent

FUKUDA HIROSHI

1 patent

YOKOYAMA NATSUKI

1 patent

OHNO TOSHIYUKI

1 patent

RENESAS ELECTRONICS CORP

1 patent

JAPAN SCIENCE & TECH AGENCY

1 patent

Showing the top 50 of 61 patents by PatentIndex Score.