Inventor
EOM TAE-MIN
KR7 patents
⚠️ This page may combine multiple inventors who share the name “EOM TAE-MIN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SAMSUNG ELECTRONICS CO LTD
5 patentsUS6803241B2Oct 12, 2004
Method of monitoring contact hole of integrated circuit using corona charges
SAMSUNG ELECTRONICS CO LTD19 citations92
US7186280B2Mar 6, 2007
Method of inspecting a leakage current characteristic of a dielectric layer and apparatus for performing the method
SAMSUNG ELECTRONICS CO LTD14 citations83
US7427573B2Sep 23, 2008
Forming composite metal oxide layer with hafnium oxide and titanium oxide
SAMSUNG ELECTRONICS CO LTD6 citations73
US7310140B2Dec 18, 2007
Method and apparatus for inspecting a wafer surface
SAMSUNG ELECTRONICS CO LTD2 citations62
US6927077B2Aug 9, 2005
Method and apparatus for measuring contamination of a semiconductor substrate
SAMSUNG ELECTRONICS CO LTD4 citations60