Inventor
JEE YUN-JUNG
KR12 patents
Patents
12 patentsUS7186280B2Mar 6, 2007
Method of inspecting a leakage current characteristic of a dielectric layer and apparatus for performing the method
SAMSUNG ELECTRONICS CO LTD14 citations83
US7428328B2Sep 23, 2008
Method of forming a three-dimensional image of a pattern to be inspected and apparatus for performing the same
SAMSUNG ELECTRONICS CO LTD7 citations73
US10249544B2Apr 2, 2019
Method of inspecting surface and method of manufacturing semiconductor device
SAMSUNG ELECTRONICS CO LTD2 citations71
US7310140B2Dec 18, 2007
Method and apparatus for inspecting a wafer surface
SAMSUNG ELECTRONICS CO LTD2 citations62
US11043433B2Jun 22, 2021
Method of inspecting surface and method of manufacturing semiconductor device
SAMSUNG ELECTRONICS CO LTD1 citations61
US10593032B2Mar 17, 2020
Defect inspection method and defect inspection apparatus
SAMSUNG ELECTRONICS CO LTD1 citations59
US7220173B2May 22, 2007
Wafer holder and wafer conveyor system equipped with the same
SAMSUNG ELECTRONICS CO LTD2 citations59
US10527556B2Jan 7, 2020
Optical measuring method and apparatus, and method of manufacturing semiconductor device using the same
SAMSUNG ELECTRONICS CO LTD0 citations49
US7666069B2Feb 23, 2010
Wafer holder and wafer conveyor equipped with the same
SAMSUNG ELECTRONICS CO LTD1 citations49
US7186577B2Mar 6, 2007
Method for monitoring a density profile of impurities
SAMSUNG ELECTRONICS CO LTD0 citations39
US10281410B2May 7, 2019
Systems and methods of testing semiconductor devices using simultaneously scanning of a plurality of regions therein and methods of forming semiconductor devices using the same
SAMSUNG ELECTRONICS CO LTD0 citations38
US10585115B2Mar 10, 2020
Scanning probe inspector
SAMSUNG ELECTRONICS CO LTD0 citations37