Inventor
SATOH DAIKI
JP11 patents
⚠️ This page may combine multiple inventors who share the name “SATOH DAIKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
8 patentsUSD559993SJan 15, 2008
Cover ring
TOKYO ELECTRON LTD499 citations98
USD559994SJan 15, 2008
Cover ring
TOKYO ELECTRON LTD529 citations98
USD560284SJan 22, 2008
Cover ring
TOKYO ELECTRON LTD25 citations92
US11830751B2Nov 28, 2023
Plasma processing apparatus and plasma processing method
TOKYO ELECTRON LTD2 citations72
US9613837B2Apr 4, 2017
Substrate processing apparatus and maintenance method thereof
TOKYO ELECTRON LTD4 citations71
US11004717B2May 11, 2021
Plasma processing apparatus and plasma processing method
TOKYO ELECTRON LTD1 citations62
US12288713B2Apr 29, 2025
Mounting table and plasma processing apparatus
TOKYO ELECTRON LTD0 citations51
US7618515B2Nov 17, 2009
Focus ring, plasma etching apparatus and plasma etching method
TOKYO ELECTRON LTD1 citations51