Inventor
HENDRIX BRYAN
US10 patents
⚠️ This page may combine multiple inventors who share the name “HENDRIX BRYAN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ADVANCED TECH MATERIALS
5 patentsUS7531679B2May 12, 2009
Composition and method for low temperature deposition of silicon-containing films such as films including silicon nitride, silicon dioxide and/or silicon-oxynitride
ADVANCED TECH MATERIALS55 citations97
US6120846ASep 19, 2000
Method for the selective deposition of bismuth based ferroelectric thin films by chemical vapor deposition
ADVANCED TECH MATERIALS65 citations94
US6010744AJan 4, 2000
Method for nucleation controlled chemical vapor deposition of metal oxide ferroelectric thin films
ADVANCED TECH MATERIALS55 citations94
US7601860B2Oct 13, 2009
Composition and method for low temperature chemical vapor deposition of silicon-containing films including silicon carbonitride and silicon oxycarbonitride films
ADVANCED TECH MATERIALS17 citations92
US7446217B2Nov 4, 2008
Composition and method for low temperature deposition of silicon-containing films
ADVANCED TECH MATERIALS29 citations92
ENTEGRIS INC
3 patentsUS9102693B2Aug 11, 2015
Composition and method for low temperature chemical vapor deposition of silicon-containing films including silicon carbonitride and silicon oxycarbonitride films
ENTEGRIS INC8 citations84
US9783558B2Oct 10, 2017
Composition and method for low temperature chemical vapor deposition of silicon-containing films including silicon carbonitride and silicon oxycarbonitride films
ENTEGRIS INC1 citations62
US11107675B2Aug 31, 2021
CVD Mo deposition by using MoOCl4
ENTEGRIS INC0 citations59