Inventor
ROEDER JEFFREY
US7 patents
⚠️ This page may combine multiple inventors who share the name “ROEDER JEFFREY”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ADVANCED TECH MATERIALS
5 patentsUS5719417AFeb 17, 1998
Ferroelectric integrated circuit structure
ADVANCED TECH MATERIALS154 citations98
US7531679B2May 12, 2009
Composition and method for low temperature deposition of silicon-containing films such as films including silicon nitride, silicon dioxide and/or silicon-oxynitride
ADVANCED TECH MATERIALS55 citations97
US5876503AMar 2, 1999
Multiple vaporizer reagent supply system for chemical vapor deposition utilizing dissimilar precursor compositions
ADVANCED TECH MATERIALS117 citations97
US5998236ADec 7, 1999
Process for controlled orientation of ferroelectric layers
ADVANCED TECH MATERIALS59 citations95
US7601860B2Oct 13, 2009
Composition and method for low temperature chemical vapor deposition of silicon-containing films including silicon carbonitride and silicon oxycarbonitride films
ADVANCED TECH MATERIALS17 citations92
ENTEGRIS INC
2 patentsUS9102693B2Aug 11, 2015
Composition and method for low temperature chemical vapor deposition of silicon-containing films including silicon carbonitride and silicon oxycarbonitride films
ENTEGRIS INC8 citations84
US9783558B2Oct 10, 2017
Composition and method for low temperature chemical vapor deposition of silicon-containing films including silicon carbonitride and silicon oxycarbonitride films
ENTEGRIS INC1 citations62