Inventor
BINNARD MICHAEL B
US31 patents
⚠️ This page may combine multiple inventors who share the name “BINNARD MICHAEL B”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
NIKON CORP
19 patentsUS6208045B1Mar 27, 2001
Electric motors and positioning devices having moving magnet arrays and six degrees of freedom
NIKON CORP118 citations98
US6650079B2Nov 18, 2003
System and method to control planar motors
NIKON CORP54 citations96
US7368838B2May 6, 2008
High efficiency voice coil motor
NIKON CORP30 citations92
US7656062B2Feb 2, 2010
Split coil linear motor for z force
NIKON CORP8 citations84
US6987559B2Jan 17, 2006
Vibration-attenuation devices having low lateral stiffness, and exposure apparatus comprising same
NIKON CORP14 citations84
US11982521B2May 14, 2024
Measurement of a change in a geometrical characteristic and/or position of a workpiece
NIKON CORP2 citations73
US9778579B2Oct 3, 2017
System and method for controlling a temperature of a reaction assembly
NIKON CORP3 citations72
US11061338B2Jul 13, 2021
High-resolution position encoder with image sensor and encoded target pattern
NIKON CORP3 citations65
US11300884B2Apr 12, 2022
Illumination system with curved 1d-patterned mask for use in EUV-exposure tool
NIKON CORP1 citations62
US11099483B2Aug 24, 2021
Euv lithography system for dense line patterning
NIKON CORP1 citations62
US10890849B2Jan 12, 2021
EUV lithography system for dense line patterning
NIKON CORP1 citations62
US10747117B2Aug 18, 2020
Extreme ultraviolet lithography system that utilizes pattern stitching
NIKON CORP1 citations62
US10712671B2Jul 14, 2020
Dense line extreme ultraviolet lithography system with distortion matching
NIKON CORP1 citations62
US10295911B2May 21, 2019
Extreme ultraviolet lithography system that utilizes pattern stitching
NIKON CORP1 citations62
US7692768B2Apr 6, 2010
Iron core motor driven automatic reticle blind
NIKON CORP2 citations61
US7466396B2Dec 16, 2008
Lithography apparatus and method utilizing pendulum interferometer system
NIKON CORP2 citations60
US11067900B2Jul 20, 2021
Dense line extreme ultraviolet lithography system with distortion matching
NIKON CORP0 citations52
US10394138B2Aug 27, 2019
System and method for control of a workpiece and a chuck
NIKON CORP0 citations51
US10078269B2Sep 18, 2018
Array of encoders for alignment measurement
NIKON CORP1 citations49
BINNARD MICHAEL B
4 patentsUS9030057B2May 12, 2015
Method and apparatus to allow a plurality of stages to operate in close proximity
BINNARD MICHAEL B7 citations82
US8212435B2Jul 3, 2012
High efficiency voice coil motor
BINNARD MICHAEL B4 citations61
US8492934B2Jul 23, 2013
Coil variations for an oval coil planar motor
BINNARD MICHAEL B1 citations51
US8853988B2Oct 7, 2014
Control systems and methods for compensating for effects of a stage motor
BINNARD MICHAEL B1 citations50
YANG PAI-HSUEH
4 patentsUS8140288B2Mar 20, 2012
On-machine methods for identifying and compensating force-ripple and side-forces produced by actuators on a multiple-axis stage
YANG PAI-HSUEH6 citations71
US9465305B2Oct 11, 2016
Method for determining a commutation offset and for determining a compensation map for a stage
YANG PAI-HSUEH3 citations70
US9013134B2Apr 21, 2015
Method for determing a commutation offset and for determining a compensation map for a stage
YANG PAI-HSUEH1 citations49
US9529353B2Dec 27, 2016
Methods for limiting counter-mass trim-motor force and stage assemblies incorporating same
YANG PAI-HSUEH0 citations40