Inventor
MATSUSHITA KIYOHIRO
JP14 patents
⚠️ This page may combine multiple inventors who share the name “MATSUSHITA KIYOHIRO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASM JAPAN
7 patentsUS7807566B2Oct 5, 2010
Method for forming dielectric SiOCH film having chemical stability
ASM JAPAN464 citations99
US7789965B2Sep 7, 2010
Method of cleaning UV irradiation chamber
ASM JAPAN527 citations98
US7763869B2Jul 27, 2010
UV light irradiating apparatus with liquid filter
ASM JAPAN507 citations98
US7501292B2Mar 10, 2009
Method for managing UV irradiation for curing semiconductor substrate
ASM JAPAN525 citations98
US6818570B2Nov 16, 2004
Method of forming silicon-containing insulation film having low dielectric constant and high mechanical strength
ASM JAPAN35 citations92
US7354852B2Apr 8, 2008
Method of forming interconnection in semiconductor device
ASM JAPAN4 citations57
US7718544B2May 18, 2010
Method of forming silicon-containing insulation film having low dielectric constant and low diffusion coefficient
ASM JAPAN1 citations48
ASM IP HOLDING BV
5 patentsUS9478414B2Oct 25, 2016
Method for hydrophobization of surface of silicon-containing film by ALD
ASM IP HOLDING BV465 citations99
US8785215B2Jul 22, 2014
Method for repairing damage of dielectric film by cyclic processes
ASM IP HOLDING BV521 citations99
US9190263B2Nov 17, 2015
Method for forming SiOCH film using organoaminosilane annealing
ASM IP HOLDING BV518 citations98
US9136108B2Sep 15, 2015
Method for restoring porous surface of dielectric layer by UV light-assisted ALD
ASM IP HOLDING BV518 citations98
US9029272B1May 12, 2015
Method for treating SiOCH film with hydrogen plasma
ASM IP HOLDING BV526 citations98