Inventor
KAGAMI KENICHI
JP7 patents
⚠️ This page may combine multiple inventors who share the name “KAGAMI KENICHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASM JAPAN
6 patentsUS7789965B2Sep 7, 2010
Method of cleaning UV irradiation chamber
ASM JAPAN527 citations98
US7763869B2Jul 27, 2010
UV light irradiating apparatus with liquid filter
ASM JAPAN507 citations98
US7582575B2Sep 1, 2009
Method for forming insulation film
ASM JAPAN467 citations98
US7501292B2Mar 10, 2009
Method for managing UV irradiation for curing semiconductor substrate
ASM JAPAN525 citations98
US6767836B2Jul 27, 2004
Method of cleaning a CVD reaction chamber using an active oxygen species
ASM JAPAN69 citations93
US7229935B2Jun 12, 2007
Method of forming a thin film by plasma CVD of a silicon-containing source gas
ASM JAPAN5 citations62