Inventor
HUANG WU-SONG S
US15 patents
⚠️ This page may combine multiple inventors who share the name “HUANG WU-SONG S”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
IBM
13 patentsUS7709370B2May 4, 2010
Spin-on antireflective coating for integration of patternable dielectric materials and interconnect structures
IBM22 citations92
US7320855B2Jan 22, 2008
Silicon containing TARC/barrier layer
IBM37 citations92
US7300741B2Nov 27, 2007
Advanced chemically amplified resist for sub 30 nm dense feature resolution
IBM7 citations73
US7944055B2May 17, 2011
Spin-on antireflective coating for integration of patternable dielectric materials and interconnect structures
IBM3 citations62
US7816068B2Oct 19, 2010
Underlayer compositions containing heterocyclic aromatic structures
IBM2 citations61
US7807332B2Oct 5, 2010
Underlayer compositions containing heterocyclic aromatic structures
IBM3 citations61
US7544750B2Jun 9, 2009
Top antireflective coating composition with low refractive index at 193nm radiation wavelength
IBM3 citations61
US7375172B2May 20, 2008
Underlayer compositions containing heterocyclic aromatic structures
IBM2 citations61
US7659050B2Feb 9, 2010
High resolution silicon-containing resist
IBM3 citations58
US7754820B2Jul 13, 2010
Fluorinated half ester of maleic anhydride polymers for dry 193 nm top antireflective coating application
IBM0 citations52
US7435537B2Oct 14, 2008
Fluorinated half ester of maleic anhydride polymers for dry 193 nm top antireflective coating application
IBM0 citations52
US7399573B2Jul 15, 2008
Method for using negative tone silicon-containing resist for e-beam lithography
IBM1 citations48
US7407736B2Aug 5, 2008
Methods of improving single layer resist patterning scheme
IBM0 citations37