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Inventor
YANG CHAN-SYUN
US
2 patents
⚠️ This page may combine multiple inventors who share the name “YANG CHAN-SYUN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
1 patent
US7807579B2
Oct 5, 2010
Hydrogen ashing enhanced with water vapor and diluent gas
APPLIED MATERIALS INC
32 citations
89
KELLY ANDREW JOSEPH
1 patent
US8901665B2
Dec 2, 2014
Gate structure for semiconductor device
KELLY ANDREW JOSEPH
7 citations
80