Inventor

POLNER DONALD N

US4 patents

⚠️ This page may combine multiple inventors who share the name “POLNER DONALD N”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

AXCELIS TECH INC

2 patents

US6207964B1Mar 27, 2001

Continuously variable aperture for high-energy ion implanter

AXCELIS TECH INC48 citations87

US7321299B2Jan 22, 2008

Workpiece handling alignment system

AXCELIS TECH INC5 citations56

SFERLAZZO PIERO

1 patent

US8225527B2Jul 24, 2012

Cooling apparatus for a web deposition system

SFERLAZZO PIERO5 citations59

CASTANTINI JAMES S

1 patent

US8500382B2Aug 6, 2013

Airflow management for particle abatement in semiconductor manufacturing equipment

CASTANTINI JAMES S4 citations46