Inventor

YANG ZUOYA

CN2 patents

Patents

2 patents

US8476085B1Jul 2, 2013

Method of fabricating dual trench isolated epitaxial diode array

ZHANG CHAO14 citations81

US9334583B2May 10, 2016

Method of preventing auto-doping during epitaxial layer growth by cleaning the reaction chamber with hydrogen chloride

ZHANG CHAO1 citations49