Inventor
CEGLIO NATALE M
US19 patents
⚠️ This page may combine multiple inventors who share the name “CEGLIO NATALE M”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
US ENERGY
5 patentsUS6002553ADec 14, 1999
Giant magnetoresistive sensor
US ENERGY118 citations97
US5071207ADec 10, 1991
Broadband diffractive lens or imaging element
US ENERGY94 citations95
US4870648ASep 26, 1989
X-ray beamsplitter
US ENERGY35 citations89
US5178974AJan 12, 1993
Virtually distortion-free imaging system for large field, high resolution lithography using electrons, ions or other particle beams
US ENERGY10 citations74
US5176970AJan 5, 1993
Virtually distortion-free imaging system for large field, high resolution lithography
US ENERGY6 citations63
MEDIA LARIO SRL
4 patentsUS8895946B2Nov 25, 2014
Source-collector modules for EUV lithography employing a GIC mirror and a LPP source
MEDIA LARIO SRL7 citations79
US8344339B2Jan 1, 2013
Source-collector module with GIC mirror and tin rod EUV LPP target system
MEDIA LARIO SRL4 citations59
US8873025B2Oct 28, 2014
EUV collector system with enhanced EUV radiation collection
MEDIA LARIO SRL0 citations50
US9585236B2Feb 28, 2017
Sn vapor EUV LLP source system for EUV lithography
MEDIA LARIO SRL0 citations49
CEGLIO NATALE M
3 patentsUS8330131B2Dec 11, 2012
Source-collector module with GIC mirror and LPP EUV light source
CEGLIO NATALE M8 citations80
US9057962B2Jun 16, 2015
Source-collector module with GIC mirror and LPP EUV light source
CEGLIO NATALE M3 citations59
US8587768B2Nov 19, 2013
EUV collector system with enhanced EUV radiation collection
CEGLIO NATALE M1 citations49