Inventor
WANG YOU-JIN
US15 patents
⚠️ This page may combine multiple inventors who share the name “WANG YOU-JIN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HERMES MICROVISION INC
7 patentsUS9113538B2Aug 18, 2015
Structure electron beam inspection system for inspecting extreme ultraviolet mask and structure for discharging extreme ultraviolet mask
HERMES MICROVISION INC9 citations83
US10054556B2Aug 21, 2018
Structure electron beam inspection system for inspecting extreme ultraviolet mask and structure for discharging extreme ultraviolet mask
HERMES MICROVISION INC3 citations72
US9572237B2Feb 14, 2017
Structure electron beam inspection system for inspecting extreme ultraviolet mask and structure for discharging extreme ultraviolet mask
HERMES MICROVISION INC2 citations72
US10176967B2Jan 8, 2019
Load lock system for charged particle beam imaging
HERMES MICROVISION INC3 citations68
US8031344B2Oct 4, 2011
Z-stage configuration and application thereof
HERMES MICROVISION INC0 citations51
US7868303B2Jan 11, 2011
Method and handling apparatus for placing patterning device on support member for charged particle beam imaging
HERMES MICROVISION INC0 citations38
US7838848B2Nov 23, 2010
Patterning device holding apparatus and application thereof
HERMES MICROVISION INC0 citations38
WANG YOU-JIN
6 patentsUS8575573B2Nov 5, 2013
Structure for discharging extreme ultraviolet mask
WANG YOU-JIN14 citations91
US8604428B2Dec 10, 2013
Method of controlling particle absorption on a wafer sample being inspected by a charged particle beam imaging system
WANG YOU-JIN2 citations60
US8302420B2Nov 6, 2012
Method for venting gas into closed space and gas supply assembly thereof
WANG YOU-JIN3 citations60
US8110818B2Feb 7, 2012
Method of controlling particle absorption on a wafer sample being inspected by a charged particle beam imaging system
WANG YOU-JIN3 citations60
US8089637B2Jan 3, 2012
Apparatus for detecting a sample
WANG YOU-JIN0 citations50
US9460887B2Oct 4, 2016
Discharging method for charged particle beam imaging
WANG YOU-JIN0 citations39