Inventor
SHIBUYA HISAE
JP43 patents
⚠️ This page may combine multiple inventors who share the name “SHIBUYA HISAE”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI HIGH TECH CORP
13 patentsUS7848563B2Dec 7, 2010
Method and apparatus for inspecting a defect of a pattern
HITACHI HIGH TECH CORP18 citations93
US7813539B2Oct 12, 2010
Method and apparatus for analyzing defect data and a review system
HITACHI HIGH TECH CORP37 citations93
US7751036B2Jul 6, 2010
Apparatus of inspecting defect in semiconductor and method of the same
HITACHI HIGH TECH CORP14 citations93
US7720275B2May 18, 2010
Method and apparatus for detecting pattern defects
HITACHI HIGH TECH CORP15 citations93
US7474394B2Jan 6, 2009
Apparatus of inspecting defect in semiconductor and method of the same
HITACHI HIGH TECH CORP27 citations93
US7084968B2Aug 1, 2006
Method for analyzing defect data and inspection apparatus and review system
HITACHI HIGH TECH CORP15 citations93
US9940184B2Apr 10, 2018
Anomaly detecting method, and apparatus for the same
HITACHI HIGH TECH CORP7 citations84
US8660340B2Feb 25, 2014
Defect classification method and apparatus, and defect inspection apparatus
HITACHI HIGH TECH CORP10 citations84
US7940385B2May 10, 2011
Defect inspection apparatus and its method
HITACHI HIGH TECH CORP5 citations74
US7912276B2Mar 22, 2011
Method and apparatus for detecting pattern defects
HITACHI HIGH TECH CORP5 citations74
US8824774B2Sep 2, 2014
Method and apparatus for inspecting patterns formed on a substrate
HITACHI HIGH TECH CORP4 citations73
US8355123B2Jan 15, 2013
Defect inspection apparatus and its method
HITACHI HIGH TECH CORP2 citations63
US7952699B2May 31, 2011
Apparatus of inspecting defect in semiconductor and method of the same
HITACHI HIGH TECH CORP0 citations52
HITACHI LTD
9 patentsUS6876445B2Apr 5, 2005
Method for analyzing defect data and inspection apparatus and review system
HITACHI LTD61 citations96
US6792367B2Sep 14, 2004
Method and apparatus for inspecting defects in a semiconductor wafer
HITACHI LTD18 citations92
US6792366B2Sep 14, 2004
Method and apparatus for inspecting defects in a semiconductor wafer
HITACHI LTD21 citations92
US6741941B2May 25, 2004
Method and apparatus for analyzing defect information
HITACHI LTD19 citations92
US9779495B2Oct 3, 2017
Anomaly diagnosis method and apparatus
HITACHI LTD9 citations84
US8027527B2Sep 27, 2011
Method for analyzing defect data and inspection apparatus and review system
HITACHI LTD9 citations84
US6870169B2Mar 22, 2005
Method and apparatus for analyzing composition of defects
HITACHI LTD18 citations84
US7639277B2Dec 29, 2009
Method for evaluating color picture tubes and device for the same and method for making color picture tubes
HITACHI LTD7 citations68
US11378521B2Jul 5, 2022
Optical condition determination system and optical condition determination method
HITACHI LTD1 citations61
SHIBUYA HISAE
8 patentsUS8437534B2May 7, 2013
Defect classification method and apparatus, and defect inspection apparatus
SHIBUYA HISAE18 citations92
US8682824B2Mar 25, 2014
Method and device for monitoring the state of a facility
SHIBUYA HISAE18 citations84
US8139841B2Mar 20, 2012
Visual inspection method and apparatus and image analysis system
SHIBUYA HISAE6 citations84
US8116556B2Feb 14, 2012
Method and apparatus for analyzing defect data and a review system
SHIBUYA HISAE6 citations84
US9659250B2May 23, 2017
Facility state monitoring method and device for same
SHIBUYA HISAE3 citations73
US8306312B2Nov 6, 2012
Method and apparatus for detecting pattern defects
SHIBUYA HISAE2 citations62
US8086422B2Dec 27, 2011
Method for analyzing defect data and inspection apparatus and review system
SHIBUYA HISAE1 citations62
US8620061B2Dec 31, 2013
Visual inspection method and apparatus and image analysis system
SHIBUYA HISAE0 citations52
HAMAMATSU AKIRA
6 patentsUS8144337B2Mar 27, 2012
Inspecting method and inspecting apparatus for substrate surface
HAMAMATSU AKIRA15 citations92
US8310665B2Nov 13, 2012
Inspecting method and inspecting apparatus for substrate surface
HAMAMATSU AKIRA9 citations84
US8310666B2Nov 13, 2012
Apparatus of inspecting defect in semiconductor and method of the same
HAMAMATSU AKIRA1 citations63
US8149396B2Apr 3, 2012
Defect inspection apparatus and its method
HAMAMATSU AKIRA2 citations63
US8654350B2Feb 18, 2014
Inspecting method and inspecting apparatus for substrate surface
HAMAMATSU AKIRA2 citations62
US8643834B2Feb 4, 2014
Apparatus of inspecting defect in semiconductor and method of the same
HAMAMATSU AKIRA0 citations52
HITACHI POWER SOLUTIONS CO LTD
3 patentsUS9933338B2Apr 3, 2018
Health management system, fault diagnosis system, health management method, and fault diagnosis method
HITACHI POWER SOLUTIONS CO LTD38 citations92
US10977568B2Apr 13, 2021
Information processing apparatus, diagnosis method, and program
HITACHI POWER SOLUTIONS CO LTD2 citations71
US9465387B2Oct 11, 2016
Anomaly diagnosis system and anomaly diagnosis method
HITACHI POWER SOLUTIONS CO LTD5 citations68
MAEDA SHUNJI
2 patentsUS9483049B2Nov 1, 2016
Anomaly detection and diagnosis/prognosis method, anomaly detection and diagnosis/prognosis system, and anomaly detection and diagnosis/prognosis program
MAEDA SHUNJI28 citations94
US8630962B2Jan 14, 2014
Error detection method and its system for early detection of errors in a planar or facilities
MAEDA SHUNJI27 citations92