P

Inventor

SHIBUYA HISAE

JP43 patents
⚠️ This page may combine multiple inventors who share the name “SHIBUYA HISAE”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

HITACHI HIGH TECH CORP

13 patents
US7848563B2Dec 7, 2010

Method and apparatus for inspecting a defect of a pattern

HITACHI HIGH TECH CORP18 citations93
US7813539B2Oct 12, 2010

Method and apparatus for analyzing defect data and a review system

HITACHI HIGH TECH CORP37 citations93
US7751036B2Jul 6, 2010

Apparatus of inspecting defect in semiconductor and method of the same

HITACHI HIGH TECH CORP14 citations93
US7720275B2May 18, 2010

Method and apparatus for detecting pattern defects

HITACHI HIGH TECH CORP15 citations93
US7474394B2Jan 6, 2009

Apparatus of inspecting defect in semiconductor and method of the same

HITACHI HIGH TECH CORP27 citations93
US7084968B2Aug 1, 2006

Method for analyzing defect data and inspection apparatus and review system

HITACHI HIGH TECH CORP15 citations93
US9940184B2Apr 10, 2018

Anomaly detecting method, and apparatus for the same

HITACHI HIGH TECH CORP7 citations84
US8660340B2Feb 25, 2014

Defect classification method and apparatus, and defect inspection apparatus

HITACHI HIGH TECH CORP10 citations84
US7940385B2May 10, 2011

Defect inspection apparatus and its method

HITACHI HIGH TECH CORP5 citations74
US7912276B2Mar 22, 2011

Method and apparatus for detecting pattern defects

HITACHI HIGH TECH CORP5 citations74
US8824774B2Sep 2, 2014

Method and apparatus for inspecting patterns formed on a substrate

HITACHI HIGH TECH CORP4 citations73
US8355123B2Jan 15, 2013

Defect inspection apparatus and its method

HITACHI HIGH TECH CORP2 citations63
US7952699B2May 31, 2011

Apparatus of inspecting defect in semiconductor and method of the same

HITACHI HIGH TECH CORP0 citations52

HITACHI LTD

9 patents

SHIBUYA HISAE

8 patents

HAMAMATSU AKIRA

6 patents

HITACHI POWER SOLUTIONS CO LTD

3 patents

MAEDA SHUNJI

2 patents

SAKAI KAORU

1 patent

HITACHI GLOBAL LIFE SOLUTIONS INC

1 patent