Inventor
SODA EIICHI
JP14 patents
⚠️ This page may combine multiple inventors who share the name “SODA EIICHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
NEC ELECTRONICS CORP
6 patentsUS7799693B2Sep 21, 2010
Method for manufacturing a semiconductor device
NEC ELECTRONICS CORP11 citations83
US7439171B2Oct 21, 2008
Method for manufacturing electronic device
NEC ELECTRONICS CORP9 citations82
US7754543B2Jul 13, 2010
Method of patterning multiple-layered resist film and method of manufacturing semiconductor device
NEC ELECTRONICS CORP4 citations61
US7488691B2Feb 10, 2009
Method of fabricating semiconductor device
NEC ELECTRONICS CORP3 citations61
US7229915B2Jun 12, 2007
Method for manufacturing semiconductor device
NEC ELECTRONICS CORP3 citations61
US7541281B2Jun 2, 2009
Method for manufacturing electronic device
NEC ELECTRONICS CORP0 citations30
TOSHIBA MEMORY CORP
3 patentsUS10153176B2Dec 11, 2018
Manufacturing method of semiconductor device and template for nanoimprint
TOSHIBA MEMORY CORP3 citations72
US9941137B2Apr 10, 2018
Substrate planarizing method and dropping amount calculating method
TOSHIBA MEMORY CORP6 citations72
US11152329B2Oct 19, 2021
Method of separating bonded substrate, method of manufacturing semiconductor storage device, and substrate separation apparatus
TOSHIBA MEMORY CORP0 citations51