P

Inventor

WU CHUNG WEN

TW52 patents
⚠️ This page may combine multiple inventors who share the name “WU CHUNG WEN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TAIWAN SEMICONDUCTOR MFG CO LTD

23 patents
US9312222B2Apr 12, 2016

Patterning approach for improved via landing profile

TAIWAN SEMICONDUCTOR MFG CO LTD11 citations93
US9837306B2Dec 5, 2017

Interconnection structure and manufacturing method thereof

TAIWAN SEMICONDUCTOR MFG CO LTD9 citations84
US11961761B2Apr 16, 2024

Mitigating pattern collapse

TAIWAN SEMICONDUCTOR MFG CO LTD1 citations73
US10861788B2Dec 8, 2020

Patterning approach for improved via landing profile

TAIWAN SEMICONDUCTOR MFG CO LTD1 citations73
US10854508B2Dec 1, 2020

Interconnection structure and manufacturing method thereof

TAIWAN SEMICONDUCTOR MFG CO LTD1 citations73
US10510588B2Dec 17, 2019

Interconnection structure and manufacturing method thereof

TAIWAN SEMICONDUCTOR MFG CO LTD3 citations73
US10332787B2Jun 25, 2019

Formation method of interconnection structure of semiconductor device

TAIWAN SEMICONDUCTOR MFG CO LTD3 citations73
US10170420B2Jan 1, 2019

Patterning approach for improved via landing profile

TAIWAN SEMICONDUCTOR MFG CO LTD1 citations73
US10157752B2Dec 18, 2018

Systems and methods for in SITU maintenance of a thin hardmask during an etch process

TAIWAN SEMICONDUCTOR MFG CO LTD4 citations73
US10043706B2Aug 7, 2018

Mitigating pattern collapse

TAIWAN SEMICONDUCTOR MFG CO LTD2 citations73
US9627250B2Apr 18, 2017

Method and apparatus for back end of line semiconductor device processing

TAIWAN SEMICONDUCTOR MFG CO LTD3 citations73
US9502287B2Nov 22, 2016

Method of preventing pattern collapse

TAIWAN SEMICONDUCTOR MFG CO LTD3 citations72
US12341057B2Jun 24, 2025

Interconnect line for semiconductor device

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations63
US11721624B2Aug 8, 2023

Patterning approach for improved via landing profile

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations63
US11398405B2Jul 26, 2022

Method and apparatus for back end of line semiconductor device processing

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations63
US11024515B2Jun 1, 2021

Systems and methods for in SITU maintenance of a thin hardmask during an etch process

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations63
US9640435B2May 2, 2017

Patterning approach for improved via landing profile

TAIWAN SEMICONDUCTOR MFG CO LTD1 citations63
US12315761B2May 27, 2025

Interconnection structure and manufacturing method thereof

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11043453B2Jun 22, 2021

Method of preventing pattern collapse

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US10950495B2Mar 16, 2021

Mitigating pattern collapse

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US10522391B2Dec 31, 2019

Method and apparatus for back end of line semiconductor device processing

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations52
US9437541B2Sep 6, 2016

Patterning approach to reduce via to via minimum spacing

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations52
US10515895B2Dec 24, 2019

Method of preventing pattern collapse

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations51

NOVATEK MICROELECTRONICS CORP

11 patents

TAIWAN SEMICONDUCTOR MFG

5 patents

WANG SIH-TING

3 patents

WU CHUNG-WEN

2 patents

TOP CASTLE HOLDINGS LTD

2 patents

CHI MEI OPTOELECTRONICS CORP

1 patent

TAIWAN TFT LCD ASS

1 patent

LIU CHIA-CHUN

1 patent

LIAO JANE-HWAY

1 patent

Showing the top 50 of 52 patents by PatentIndex Score.