Inventor
HORN PAUL
US7 patents
⚠️ This page may combine multiple inventors who share the name “HORN PAUL”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
KLA TENCOR CORP
6 patentsUS10563973B2Feb 18, 2020
All surface film metrology system
KLA TENCOR CORP11 citations81
US9640449B2May 2, 2017
Automated inline inspection of wafer edge strain profiles using rapid photoreflectance spectroscopy
KLA TENCOR CORP5 citations71
US9885656B2Feb 6, 2018
Line scan knife edge height sensor for semiconductor inspection and metrology
KLA TENCOR CORP1 citations50
US9752992B2Sep 5, 2017
Variable image field curvature for object inspection
KLA TENCOR CORP1 citations48
US9719943B2Aug 1, 2017
Wafer edge inspection with trajectory following edge profile
KLA TENCOR CORP0 citations48
US10317344B2Jun 11, 2019
Speed enhancement of chromatic confocal metrology
KLA TENCOR CORP0 citations38