Inventor
KWON BYOUNGHO
KR22 patents
⚠️ This page may combine multiple inventors who share the name “KWON BYOUNGHO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SAMSUNG ELECTRONICS CO LTD
17 patentsUS10177160B2Jan 8, 2019
Semiconductor device and method of fabricating the same
SAMSUNG ELECTRONICS CO LTD16 citations91
US9677002B2Jun 13, 2017
Etching composition
SAMSUNG ELECTRONICS CO LTD2 citations71
US10716755B2Jul 21, 2020
Method of fabricating semiconductor device
SAMSUNG ELECTRONICS CO LTD4 citations70
US10916554B2Feb 9, 2021
Three-dimensional semiconductor memory device
SAMSUNG ELECTRONICS CO LTD2 citations68
US11322346B2May 3, 2022
Cleaning substrate method and method of processing substrate using the same
SAMSUNG ELECTRONICS CO LTD3 citations67
US12482699B2Nov 25, 2025
Manufacturing method of semiconductor device including forming a recess filling pattern
SAMSUNG ELECTRONICS CO LTD0 citations62
US11654458B2May 23, 2023
Substrate-cleaning apparatus having tiltable roll brush
SAMSUNG ELECTRONICS CO LTD0 citations62
US10777560B2Sep 15, 2020
Semiconductor device and method of fabricating the same
SAMSUNG ELECTRONICS CO LTD1 citations61
US11964357B2Apr 23, 2024
Conditioner, chemical mechanical polishing apparatus including the same and method of manufacturing a semiconductor device using the apparatus
SAMSUNG ELECTRONICS CO LTD0 citations60
US11471996B2Oct 18, 2022
Conditioner, chemical mechanical polishing apparatus including the same and method of manufacturing a semiconductor device using the apparatus
SAMSUNG ELECTRONICS CO LTD0 citations60
US10504960B2Dec 10, 2019
Semiconductor memory devices
SAMSUNG ELECTRONICS CO LTD1 citations60
US11590628B2Feb 28, 2023
Rotary body module and chemical mechanical polishing apparatus having the same
SAMSUNG ELECTRONICS CO LTD0 citations59
US10566338B2Feb 18, 2020
Three-dimensional semiconductor memory device and method of fabricating the same
SAMSUNG ELECTRONICS CO LTD1 citations58
US10756092B2Aug 25, 2020
Method of fabricating semiconductor device
SAMSUNG ELECTRONICS CO LTD0 citations51
US10748906B2Aug 18, 2020
Semiconductor device and method of fabricating the same
SAMSUNG ELECTRONICS CO LTD0 citations51
US10622364B2Apr 14, 2020
Method of fabricating semiconductor device
SAMSUNG ELECTRONICS CO LTD0 citations51
US9165759B2Oct 20, 2015
Etching composition and method of manufacturing semiconductor device using the same
SAMSUNG ELECTRONICS CO LTD1 citations50