Inventor
HO LIN-CHEN
TW14 patents
Patents
14 patentsUS10604678B1Mar 31, 2020
Chemical mechanical polishing of tungsten using a method and composition containing quaternary phosphonium compounds
ROHM & HAAS ELECT MATERIALS CMP HOLDINGS INC4 citations71
US9984895B1May 29, 2018
Chemical mechanical polishing method for tungsten
ROHM & HAAS ELECT MATERIALS CMP HOLDINGS INC3 citations71
US10600655B2Mar 24, 2020
Chemical mechanical polishing method for tungsten
ROHM & HAAS ELECT MATERIALS CMP HOLDINGS INC2 citations62
US10947415B2Mar 16, 2021
Chemical mechanical polishing of tungsten using a method and composition containing quaternary phosphonium compounds
ROHM & HAAS ELECT MATERIALS CMP HOLDINGS INC0 citations61
US11339308B2May 24, 2022
Chemical mechanical polishing method
ROHM & HAAS ELECT MATERIALS CMP HOLDINGS INC0 citations50
US10815392B2Oct 27, 2020
Chemical mechanical polishing method for tungsten
ROHM & HAAS ELECT MATERIALS CMP HOLDINGS INC0 citations50
US10640682B2May 5, 2020
Chemical mechanical polishing method for tungsten
ROHM & HAAS ELECT MATERIALS CMP HOLDINGS INC0 citations50
US10633558B2Apr 28, 2020
Chemical mechanical polishing method for tungsten
ROHM & HAAS ELECT MATERIALS CMP HOLDINGS INC0 citations50
US10633557B2Apr 28, 2020
Chemical mechanical polishing method for tungsten
ROHM & HAAS ELECT MATERIALS CMP HOLDINGS INC0 citations50
US10286518B2May 14, 2019
Chemical mechanical polishing method for tungsten
ROHM & HAAS ELECT MATERIALS CMP HOLDINGS INC0 citations50
US10597558B1Mar 24, 2020
Chemical mechanical polishing composition and method for tungsten
ROHM & HAAS ELECT MATERIALS CMP HOLDINGS INC0 citations42
US10557060B2Feb 11, 2020
Method of chemical mechanical polishing a substrate
ROHM & HAAS ELECT MATERIALS CMP HOLDINGS INC0 citations40
US10181408B2Jan 15, 2019
Chemical mechanical polishing method for tungsten using polyglycols and polyglycol derivatives
ROHM & HAAS ELECT MATERIALS CMP HOLDINGS INC0 citations40
US10640681B1May 5, 2020
Chemical mechanical polishing composition and method for tungsten
ROHM & HAAS ELECT MATERIALS CMP HOLDINGS INC0 citations31