Inventor
WATANABE REO
JP6 patents
Patents
6 patentsUS10199245B2Feb 5, 2019
Ceramic heater, heater electrode, and method for manufacturing ceramic heater
NGK INSULATORS LTD2 citations71
US11223302B2Jan 11, 2022
Electrostatic chuck having an annular outer region covered by an insulating film
NGK INSULATORS LTD2 citations70
US11688590B2Jun 27, 2023
Electrostatic-chuck heater
NGK INSULATORS LTD0 citations59
US11664203B2May 30, 2023
Electrostatic-chuck heater
NGK INSULATORS LTD0 citations59
US12150215B2Nov 19, 2024
Wafer placement table
NGK INSULATORS LTD0 citations45
US12108498B2Oct 1, 2024
Wafer placement table
NGK INSULATORS LTD0 citations45