Inventor
KATO RUI
JP5 patents
Patents
5 patentsUS10288561B1May 14, 2019
Gas analyzer
SHIMADZU CORP2 citations65
US9228828B2Jan 5, 2016
Thickness monitoring device, etching depth monitoring device and thickness monitoring method
SHIMADZU CORP2 citations57
US9460973B2Oct 4, 2016
Surface processing progress monitoring system
SHIMADZU CORP0 citations36
US9007599B2Apr 14, 2015
Depth of hole measurement by subtracting area of two spectra separated by time
SHIMADZU CORP0 citations36
US9001337B2Apr 7, 2015
Etching monitor device
SHIMADZU CORP0 citations36