Inventor

GABER ERWIN

DE5 patents

⚠️ This page may combine multiple inventors who share the name “GABER ERWIN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ZEISS CARL SMT AG

2 patents

US7079331B2Jul 18, 2006

Device for holding a beam splitter element

ZEISS CARL SMT AG7 citations71

US6593998B2Jul 15, 2003

Projection exposure system

ZEISS CARL SMT AG4 citations61

ZEISS CARL MEDITEC AG

2 patents

US11474281B2Oct 18, 2022

Optical element and method of making an optical element

ZEISS CARL MEDITEC AG0 citations55

US10698135B2Jun 30, 2020

Optical element and method of making an optical element

ZEISS CARL MEDITEC AG0 citations45

ZEISS STIFTUNG

1 patent

US6388823B1May 14, 2002

Optical system, especially a projection light facility for microlithography

ZEISS STIFTUNG126 citations96