Inventor
SHIRAISHI MASATOSHI
JP13 patents
⚠️ This page may combine multiple inventors who share the name “SHIRAISHI MASATOSHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
8 patentsUS5401316AMar 28, 1995
Method and apparatus for hydrophobic treatment
TOKYO ELECTRON LTD141 citations97
US5939130AAug 17, 1999
Coating film forming method and coating film forming apparatus
TOKYO ELECTRON LTD84 citations94
US5501870AMar 26, 1996
Method and apparatus for hydrophobic treatment
TOKYO ELECTRON LTD42 citations91
US12571120B2Mar 10, 2026
Plating apparatus
TOKYO ELECTRON LTD0 citations61
US11781215B2Oct 10, 2023
Substrate processing method of forming a plating film in a recess
TOKYO ELECTRON LTD0 citations61
US7670960B2Mar 2, 2010
Substrate processing method
TOKYO ELECTRON LTD2 citations57
US7550043B2Jun 23, 2009
Substrate processing method and substrate processing apparatus
TOKYO ELECTRON LTD3 citations56
US7678532B2Mar 16, 2010
Method of processing a substrate
TOKYO ELECTRON LTD0 citations36