Inventor
DEGUCHI MASATOSHI
JP17 patents
⚠️ This page may combine multiple inventors who share the name “DEGUCHI MASATOSHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
12 patentsUS5580607ADec 3, 1996
Coating apparatus and method
TOKYO ELECTRON LTD104 citations98
US5658615AAug 19, 1997
Method of forming coating film and apparatus therefor
TOKYO ELECTRON LTD187 citations97
US6063190AMay 16, 2000
Method of forming coating film and apparatus therefor
TOKYO ELECTRON LTD94 citations96
US5942035AAug 24, 1999
Solvent and resist spin coating apparatus
TOKYO ELECTRON LTD103 citations96
US6281145B1Aug 28, 2001
Apparatus and method for applying process solution
TOKYO ELECTRON LTD62 citations95
US6473151B1Oct 29, 2002
Substrate processing apparatus
TOKYO ELECTRON LTD24 citations92
US6466300B1Oct 15, 2002
Substrate processing apparatus
TOKYO ELECTRON LTD30 citations92
US6821550B2Nov 23, 2004
Apparatus and method for applying process solution
TOKYO ELECTRON LTD16 citations83
US6659661B2Dec 9, 2003
Substrate processing apparatus
TOKYO ELECTRON LTD18 citations83
US8846495B2Sep 30, 2014
Bonding system and bonding method
TOKYO ELECTRON LTD3 citations62
US7517217B2Apr 14, 2009
Method and apparatus for heat processing of substrate
TOKYO ELECTRON LTD2 citations61
US6969538B2Nov 29, 2005
Method for heat processing of substrate
TOKYO ELECTRON LTD1 citations50