P

Inventor

SINGLETON JR CHARLES WAYNE

US5 patents
⚠️ This page may combine multiple inventors who share the name “SINGLETON JR CHARLES WAYNE”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

HIRAKAWA OSAMU

3 patents
US9919509B2Mar 20, 2018

Peeling device, peeling system and peeling method

HIRAKAWA OSAMU2 citations69
US9956755B2May 1, 2018

Separation method, separation apparatus, and separation system

HIRAKAWA OSAMU0 citations38
US9827756B2Nov 28, 2017

Separation apparatus, separation system, and separation method

HIRAKAWA OSAMU0 citations38

TOKYO ELECTRON LTD

1 patent
US9679798B2Jun 13, 2017

Substrate conveyance apparatus and substrate peeling system

TOKYO ELECTRON LTD0 citations47

OKADA SHINJI

1 patent
US10008419B2Jun 26, 2018

Separation method, computer storage medium, and separation system

OKADA SHINJI0 citations37